Toriumi Lab. Dept. of Materials Engineering, The Univ. of Tokyo
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Output (Calender year)
2019 2018 2017 2016 2014 2013 2012 2011 2010 2009
2008 2007 2006 2005 2004 2003 2002 2001


 
Awards List

-2015-
Publication

  • Xiuyan Li, Takeaki Yajima Tomonori Nishimura, Akira Toriumi
    "Study of Si kinetics in interfacial SiO2 scavenging in HfO2 gate stacks. "
    Appl. Phys. Exp. 8, 061304 (2015).
  • T. Yajima, T. Nishimura, A, Toriumi
    "Positive-bias gate-controlled metal-insulator transition in ultrathin VO2 channels with TiO2 gate dielectrics. "
    Nature Commun. 6, 10104 (2015).
  • T. Yajima, Y. Hikita1, M. Minohara, C. Bell, J. A. Mundy, L. F. Kourkoutis, D. A. Muller, H. Kumigashira, M. Oshima and H. Y. Hwang
    "Engineering Artificial Interface Dipoles at Oxide Heterointerfaces. "
    PF Activity Report 32, 12 (2015).
  • Nan Fang, Kosuke Nagashio, and Akira Toriumi
    "Subthreshold transport in mono- and multilayered MoS2 FETs. "
    Appl. Phys. Exp. 8, 065203 (2015).
  • T. Yajima, Y. Ninomiya, T. Nishimura, and A. Toriumi
    "Drastic change in electronic domain structures via strong elastic coupling in VO2 films. "
    Phys. Rev. B 91, 205102 (2015).
  • T. Yajima, Y. Hikita, M. Minohara, C. Bell, J. A. Mundy, L. F. Kourkoutis, D. A. Muller, H. Kumigashira, M. Oshima & H. Y. Hwang
    "Controlling band alignments by artificial interface dipoles at perovskite heterointerfaces. "
    Nature Commun. 6, 6759 (2015).
  • T. Yajima, M. Minohara, C. Bell, H. Kumigashira, M. Oshima, H. Y. Hwang, and Y. Hikita
    "Enhanced Electrical Transparency by Ultrathin LaAlO3 Insertion at Oxide Metal/Semiconductor Heterointerfaces. "
    Nano Lett. 15, 1622 (2015).
  • Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Kosuke Nagashio, and Akira Toriumi
    "Reliability assessment of germanium gate stacks with promising initial characteristics. "
    Appl. Phys. Exp. 8, 021301 (2015).
  • Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima and Akira Toriumi
    "Nondestructive characterization of oxide/germanium interface by direct-gap photoluminescence analysis. "
    Appl. Phys. Exp. 8, 051301 (2015).


International conference

  • Cimang Lu and Akira Toriumi,
    "Structural coordination of rigidity with flexibility in gate dielectric films for sub-nm EOT Ge gate stack reliability",
    IEDM 14.6
    (Dec. 8, 2015, Washington D.C., USA)
  • Xiuyan Li and Akira Toriumi,
    "Self-decomposition of SiO2 due to Si-chemical potential increase in SiO2 between HfO2 and substrate - Comprehensive understanding of SiO2-IL scavenging in HfO2 gate stacks on Si, SiGe and SiC",
    IEDM 21.4
    (2015, Washington D.C., USA)
  • Che-Tsung Chang and Akira Toriumi,
    "Preferential oxidation of Si in SiGe for shaping Ge-rich SiGe gate stacks",
    IEDM 21.5
    (Dec. 8, 2015, Washington D.C., USA)
  • Shoichi Kabuyanagi and Akira Toriumi,
    "Effects of free-carriers on rigid band and bond descriptions in germanium - Key to designing and modeling in Ge nano-devices -",
    IEDM 34.2
    (Dec. 9, 2015, Washington D.C., USA)
  • Akira Toriumi
    "Materials and Process Controls in Germanium Gate Stacks", invited
    SISC(46th IEEE Semiconductor Interface Specialists Conference),
    (Dec. 4, 2015, Arlington, VA, USA)
  • Takeaki Yajima
    "Interaction between 2D Electrons and 3D Metal-Insulator Transitions in VO2-Channel Transistors",
    CEMS Topical Meeting on Oxide Interfaces T05
    (2015, Wako, Japan)
  • Lun Xu, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
    "Anomalous Electrical Properties of Au/SrTiO3 Interface",
    IWDTF p119
    (Nov.4, 2015, Miraikan, National Museum of Emerging Science and Innovation, Tokyo, Japan)
  • Tomonori Nishimura, Takeaki Yajima, Shinji Migita, Akira Toriumi
    "Ferroelectric Properties of Non-Doped Thin HfO2 Films",
    IWDTF p7
    (Nov.2, 2015, Miraikan, National Museum of Emerging Science and Innovation, Tokyo, Japan)
  • Akira Toriumi
    "Technical Advancements and Scientific Impacts of HfO2 Gate Stacks",
    IWDTF p11
    (Nov. 2, 2015, Miraikan, National Museum of Emerging Science and Innovation, Tokyo, Japan)
  • T. Yajimia, G. Oike, T. Nishimura, and A. Toriumi,
    "Electrochemical Doping as an Alternative to Ion Implantation in Oxide Semiconductor Thin Films",
    228th ECS Meeting E04
    (Oct. 15, 2015, Phoenix, AZ, USA)
  • A. Toriumi, C. Lee, and T. Nishimura,
    "Effects of Ge Substrate Annealing in H2 on Electron Mobility and on Junction Leakage in n-Channel Ge Mosfets", invited
    228th ECS Meeting,
    (Oct. 14, 2015, Phoenix, AZ, USA)
  • S. Kabuyanagi, T. Nishimura, T. Yajimia and A. Toriumi,
    "Gate-Bias Dependent Phonon Softening Observed in Ge Mosfets",
    228th ECS Meeting G04
    (Oct. 13, 2015, Phoenix, AZ, USA)
  • A. Toriumi and X. Li,
    "Scavenging Kinetics of Interfacial SiO2 in HfO2/SiO2/Si Gate Stacks ", invited
    228th ECS Meeting,
    (Oct. 13, 2015, Phoenix, AZ, USA)
  • S. Kabuyanagi, T. Nishimura, T. Yajimia and A. Toriumi,
    "Direct Evidence of Freecarrier Induced Bandgap Narrowing in Ge",
    SSDM N-3-2
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • T. Yajimia, T. Nishimura, and A. Toriumi,
    "Solid-State Operation of Mott Transistors with Ultra-Thin VO2 Channels",
    SSDM H-3-3
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • X. Li, T. Yajimia, T. Nishimura, and A. Toriumi,
    "Comprehensive Understanding of SiO2-IL Scavenging in HfO2/SiO2/Si Stack",
    SSDM N-3-4
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • C. Lu, C.H. Lee, T. Nishimura and A. Toriumi,
    "Beyond GeO2 on Ge: Network Modification of GeO2 for Reliable Ge Gate Stacks",
    SSDM N-4-1
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • C.T. Chang, T. Nishimura, and A. Toriumi,
    "Thermodynamic Knob for High Performance SiGe Gate Stack Formation",
    SSDM N-4-4
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • N.Fang, K.Nagashio, A.Toriumi
    "
    Direct Evidence of Defect-defect Correlation in Atomically Thin MoS2 Layer by Random Telegraphic Signals Observed in Back-gated FETs",
    SSDM D-3-6L
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • T.C. Liu, S. Kabuyanagi, T. Nishimura, and A. Toriumi,
    "n+Si/pGe Cross Heterojunctions Fabricated by Narrow Membrane Bonding",
    SSDM PS-1-10
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • T. Nishimura, T. Nakamura, T. Yajima and A. Toriumi,
    "Observation of Plastic and Elastic Deformations in Ge Films of Bonded GeOI",
    SSDM PS-1-14
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • K. Izukashi, T. Nishimura, S. Migita, and A. Toriumi,
    "New Structural Properties of Ferroelectric Y2O3-doped HfO2 Films Probed by Microscopic Raman Spectroscopy Measurements",
    SSDM PS-1-20
    (Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
  • A. Toriumi,
    "Opportunities of high performance Ge CMOS",
    Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors V,
    (Jun. 17, 2015, Lake Tahoe, California, USA)
  • T. Yajima, T. Nishimura, and A. Toriumi
    "Interaction between 2D electrons and 3D metal-insulator transition in VO2-channel transistors",
    ep2ds-21,
    (Jul. 28, 2015, Sendai, Japan)
  • C. Lu, C. H. Lee, T. Nishimura, and A. Toriumi
    "Design and Demonstration of Reliability-Aware Ge Gate Stacks with 0.5 nm EOT",
    2015 Symposium on VLSI Technology,
    (Jun. 16, 2015, Rihga Royal Hotel Kyoto, Kyoto, Japan)
  • S. Kabuyanagi, T. Nishimura, T. Yajima, and A. Toriumi,
    "Effect of Free Carrier Accumulation or Depletion on Zone-center Vibrational Mode in Ge",
    2015 Silicon Nanoelectronics Workshop
    (Jun. 15, 2015, Rihga Royal Hotel Kyoto, Kyoto, Japan)
  • X. Li, T. Yajima, T. Nishimura, and A. Toriumi,
    "Significance of Kinetic-linkage of Oxygen Vacancy with SiO2/Si Interface for SiO2-IL Scavenging in HfO2 Gate Stacks",
    2015 Silicon Nanoelectronics Workshop
    (Jun. 14, 2015, Rihga Royal Hotel Kyoto, Kyoto, Japan)
  • T. Nishimura, C. H. Lee, T. Nakamura, T. Yajima, K. Nagashio, K. Kita, and A.Toriumi,
    "Recent progress of Ge junction technology", invited,
    15th International Workshop on Junction Technology (IWJT2015),
    (Jun. 12, 2015, Kyoto University (Uji Campus), Kyoto, Japan)
  • T. Nishimura, T. Yajima, S. Migita, and A. Toriumi,
    "Interface-Driven Ferroelectricity of Non-Doped HfO2",
    2015 JOINT ISAF-ISIF-PFM CONFERENCE
    (May 27, 2015, Singapore)
  • A. Toriumi, C. H. Lee, and T. Nishimura
    "H2 Annealing Effects of Ge Substrate both on Electron Mobility and on Junction Leakage in Ge n-MOSFETs", invited
    The 2015 E-MRS Spring Meeting
    (May 14, 2015, Lille, France)
  • Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
    "Critical Role of Domain Boundary Parallel to the Interface in the Operation of VO2 Mott Transistors. "
    2015 MRS Spring Meeting, SS2.01
    (Apr. 7, 2015, San Francisco, USA)
  • Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima, and Akira Toriumi
    "Study of Raman Peak Shift in Heavily Doped Germanium - A new research opportunity using ultra-thin GeOI. "
    8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-04
    (Jan. 29, 2015, Sendai, Japan)
  • C. H. Lee, T. Nishimura, C. Lu, S. Kabuyanagi, and A. Toriumi
    "Impact of Hydrogen-induced Out-diffusion of Oxygen from Ge Surface on Junction Leakage and Electron Mobility in Ge n-MOSFETs. "
    8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-05
    (Jan. 29, 2015, Sendai, Japan)
  • C-T. Chang, T. Nishimura and A. Toriumi
    "Dielectric Film Engineering for Ge-rich SiGe MOS Gate Stacks. "
    8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-08
    (Jan. 29, 2015, Sendai, Japan)
  • Tony C. Liu, Shoichi Kabuyanagi, Tomonori Nishimura, and Akira Toriumi
    "Fabrication and Characterization of n+Si/pGe Heterojunctions by Narrow Membrane Bonding. "
    8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-09
    (Jan. 29, 2015, Sendai, Japan)
  • T. Yajima
    "Nano-scale electrochemical doping in oxide semiconductor. "
    SNU-UT Ad-hoc Workshop on Electronic and ionic processes at heterogeneous interfaces
    (2015, Seoul, Japan)


Domestic

  • 鳥海明
    「Ge基板中酸素の役割-良いこと、悪いこと-」
    NWDTF2015 in KOCHI
    (2015年12月19日, 高知工科大学, 高知県、高知市)
  • 株柳 翔一、西村 知紀、矢嶋 赳彬、鳥海 明
    「フリーキャリア密度に依存したGeの電子物性およびフォノン物性」,
    2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 15p-1C-11
    (2015年9月16日,名古屋国際会議場, 愛知県、名古屋市)
  • 矢嶋 赳彬、西村 知紀、鳥海 明
    「VO2チャネルトランジスタのチャネル膜厚に依存したゲート変調」,
    2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 14p-2H-13
    (2015年9月15日,名古屋国際会議場, 愛知県、名古屋市)
  • 矢嶋 赳彬、西村 知紀、鳥海 明
    「チタン酸化物薄膜への電気化学的手法による微細領域キャリアドーピング」,
    2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 14p-2H-13
    (2015年9月15日,名古屋国際会議場, 愛知県、名古屋市)
  • 柴山 茂久、方 楠、矢嶋 赳彬、西村 知紀、長汐 晃輔、鳥海 明
    「1T-TaS2の相転移に対する温度およびゲートバイアス変調効果」,
    2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 15p-1C-15
    (2015年9月15日,名古屋国際会議場, 愛知県、名古屋市)
  • 矢嶋赳彬、西村知紀、鳥海明
    「VO2チャネルトランジスタのゲート電場に対する時間応答」
    2015 第76回応用物理学会秋季学術講演会, 6.3酸化物エレクトロニクス 14p-2H-15
    (2015年9月14日,名古屋国際会議場, 愛知県、名古屋市)
  • C.Lu, C. Lee, T. Nishimura, and A. Toriumi,
    "Interface-aware high-k dielectric designing for deep sub-nm EOT Ge gate stack"
    Young Scientist Presentation Award Speech
    2015 第76回応用物理学会秋季学術講演会, 6.3酸化物エレクトロニクス 14a-4C-10
    (2015年9月14日,名古屋国際会議場, 愛知県、名古屋市)
  • Akira Toriumi
    「Ge-CMOSのためのGeO2/Ge界面制御」,
    2015 第76回応用物理学会秋季学術講演会, シンポジウム(越境する絶縁膜/半導体界面技術 ~ Si から Non-Si へ)14p-4C-3
    (2015年9月14日,名古屋国際会議場, 愛知県、名古屋市)
  • X. Li, T. Yajima, T. Nishimura, and A. Toriumi
    "The critical role of Si chemical potential in SiO2 scavenging in HfO2 gate stacks"
    2015 第76回応用物理学会秋季学術講演会, 13.3絶縁膜技術 13a-4C-12
    (2015年9月13日,名古屋国際会議場, 愛知県、名古屋市)
  • C.Lu, T. Nishimura, and A. Toriumi,
    "How to secure both sufficient passivation and long term reliability in Ge gate stack -The key is to keep a proper network structure of oxides-"
    2015 第76回応用物理学会秋季学術講演会, シンポジウム(Ge-CMOSはどこまで進んでいるのか)13p-4C-1
    (2015年9月13日,名古屋国際会議場, 愛知県、名古屋市)
  • Akira Toriumi
    「どこまでGe-CMOS技術は進んでいるのか - イントロダクション -」,
    2015 第76回応用物理学会秋季学術講演会, シンポジウム(Ge-CMOSはどこまで進んでいるのか)13p-4C-1
    (2015年9月13日,名古屋国際会議場, 愛知県、名古屋市)
  • Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Kosuke Nagashio, Akira Toriumi
    「Reliability-aware Germanium Gate Stack Formation by GeO2 Network Modification」,
    2015 第62回応用物理学会春季学術講演会, 13.3 絶縁膜技術 14a-A24-11
    (2015年3月14日, 東海大学湘南キャンパス(平塚))
  • Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Kosuke Nagashio, Akira Toriumi
    「Design of High-k and Interfacial Layer on Germanium for 0.5nm EOT」,
    2015 第62回応用物理学会春季学術講演会, 13.3 絶縁膜技術 14a-A24-12
    (2015年3月14日, 東海大学湘南キャンパス(平塚))
  • Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima, Akira Toriumi
    「Non-destructive Characterization of Oxide/Ge Interface by Photoluminescence Measurement」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-4
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • Chi Liu, Shoichi Kabuyanagi, Tomonori Nishimura, Akira Toriumi
    「n+Si/pGe Heterojunctions Fabricated by Narrow Membrane Bonding」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-5
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • Toshimitsu Nakamura, Tomonori Nishimura, Takeaki Yajima, Akira Toriumi
    「Inspection of elastic stress and generated defects in thin Ge filmon GeOI wafer」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-7
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima, Akira Toriumi
    「Phonon-softening in Germanium by Free Carrier Accumulation -Experimental Distinction between Impurity and Free Carrier Effect-」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-9
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • Xiuyan Li, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
    「Catalytic Effect of Substrate-Si on SiO2-IL Scavenging in HfO2/SiO2/Si Stacks」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-10
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • Xiuyan Li, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
    「Analytical Model for SiO2-IL Scavenging in HfO2/SiO2/Si Stacks」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-11
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • CheTsung Chang, Tomonori Nishimura, Akira Toriumi
    「2-nm-EOT Y-Si-O Gate Stack Formation on Si0.5Ge0.5」,
    2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-12
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • 西村 知紀, 矢嶋 赳彬, 鳥海 明
    「TiN/HfO2/TiN構造におけるHfO2膜の強誘電的特性」,
    2015 第62回応用物理学会春季学術講演会, 13.3 絶縁膜技術 13a-A24-13
    (2015年3月13日, 東海大学湘南キャンパス(平塚))
  • 矢嶋 赳彬, 西村 知紀, 鳥海 明
    「TiO2固体絶縁膜を用いたVO2モットトランジスタの動作機構の研究」,
    2015 第62回応用物理学会春季学術講演会, 6.3 酸化物エレクトロニクス 13a-D10-9
    (2015年3月13日, 東海大学湘南キャンパス(平塚))
  • 矢嶋 赳彬, 西村 知紀, 鳥海 明
    「VO2薄膜における金属・絶縁体転移を用いた電界効果三端子素子の実証」,
    2015 第62回応用物理学会春季学術講演会, 13 半導体シンポジウム 12p-A29-11
    (2015年3月12日, 東海大学湘南キャンパス(平塚))
  • 株柳 翔一, 西村 知紀, 矢嶋 赳彬, 鳥海 明
    「電子濃度および界面の境界条件に強く依存したGeの電子構造」,
    第20回ゲートスタック研究会, 5-2
    (2015年1月31日, 東レ研修センター(三島))
  • Xiuyan Li, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
    「Kinetic Studying of SiO2-IL Scavenging in HfO2/SiO2/Si Stack」,
    第20回ゲートスタック研究会, 4-3
    (2015年1月31日, 東レ研修センター(三島))
  • Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Akira Toriumi
    「Critical Roles of Doped-Metal Cation in GeO2 for Gate Stack Formation on Ge」,
    第20回ゲートスタック研究会, 7-4
    (2015年1月31日, 東レ研修センター(三島))



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