Toriumi Lab. Dept. of Materials Engineering, The Univ. of Tokyo
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Output (Calender year)
2019 2018 2017 2016 2015 2014 2013 2012 2010
2009
2008 2007 2006 2005 2004 2003 2002 2001


 
Awards List

-2011-

Publication

  • K. Tomida, K. Kita, and A. Toriumi,
    "Higher-k Scalability and Leakage Current Reduction of SiO2-Doped HfO2 in Direct Tunneling Regime",
    Japanese Journal of Applied Physics, 50 (2011) 111502,
    published online Oct. 27, 2011
  • S. k. Wang, K. Kita, T. Nishimura, K. Nagashio and A. Toriumi,
    "Kinetic Effects of O-Vacancy Generated by GeO2/Ge Interfacial Reaction"
    Japanese Journal of Applied Physics, 50 (2011) 10PE04-1,
    published online Oct. 20, 2011
  • A. Toriumi, Y. Nakajima and K. Kita ,
    "Opportunity for Phase-controlled Higher-k HfO2",
    ECS Transactions, 41 (7) 125-136 (2011),Oct. 2011
  • K. Nagashio, T. Yamashita, T. Nishimura, K. Kita and A. Toriumi,
    "Electrical transport properties of graphene on SiO2 with specific surfacestructures",
    Journal of Applied Physics, 110, 024513 (2011),
    published online Jul. 29, 2011

  • K. Nagashio, A. Toriumi,
    "Density-of-States Limited Contact Resistance in Graphene Field-Effect Transistors",

    Japanese Journal of Applied Physics, 50 (2011) 070108,
    published online Jul. 20, 2011
  • T. Nishimura, C.H. Lee, T. Tabata, S.K. Wang, K. Nagashio, K. Kita and A. Toriumi,
    "High-Electron-Mobility Ge n-Channel Metal-Oxide-Semiconductor Field-Effect Transistors with High-Pressure Oxidized Y2O3",
    Applied Physics Express, 4 (2011)064201,
    published online Jun. 2, 2011
  • A. Toriumi, C. H. Lee, T. Nishimura, S. K. Wang, K. Kita, and K. Nagashio,
    "Recent progress of Ge technology for a post-Si CMOS",
    ECS Transactions 35(3) 443-456, May 2011
  • D. D. Zhao, T. Nishimura, C. H. Lee, R. Ifuku, K. Nagashio, K. Kita, and A. Toriumi,
    "Junctionless Ge MOSFETs Fabricated on 10 nm-Thick GeOI Substrate",
    ECS Transactions 35(3) 457-464, May 2011
  • 長汐晃輔,鳥海明,
    “グラフェントランジスタの接合/界面に対する理解と制御”
    グラフェン・イノベーション, 日経BP社, 東京, 66-79, 2011
  • C. H. Lee, T. Nishimura, K. Nagashio, K. Kita, and A. Toriumi,
    "High-Electron-Mobility Ge/GeO2 n-MOSFETs With Two-Step Oxidation",
    IEEE Tran. Electron Devices, vol. 58, no. 5, pp. 1295-1301, May 2011.
  • S. K. Wang, K. Kita, T. Nishimura, K. Nagashio, and A. Toriumi,
    "Isotope tracing study of GeO desorption mechanism from GeO2/Ge stack using 73Ge and 18O",
    Japanese Journal of Applied Physics, 50 (2011)04DA01,
    published online Apr. 20, 2011

  • L.Q. Zhu, K. Kita, T. Nishimura, K. Nagashio, S.K. Wang, and A. Toriumi,
    "Interfacial Dipole at High-k Dielectric/SiO2 Interface: X-ray Photoelectron Spectroscopy Characteristics",
    Japanese Journal of Applied Physics, 50 (2011) 031502,

    published online Mar. 22, 2011
  • D. D. Zhao, T. Nishimura, C.H. Lee, K. Nagashio, K. Kita, and A. Toriumi,
    "Junctionless Ge p-Channel Metal-Oxide-Semiconductor Field-EffectTransistors Fabricated on Ultra-thin Ge-on-Insulator Substrate",
    Applied Physics Express, 4 (2011)031302.

    published online Mar. 2, 2011

International

  • A. Toriumi, C. H. Lee, S. K. Wang, T. Tabata, M. Yoshida, D. D. Zhao, T. Nishimura, K. Kita, and K. Nagashio,
    "Material Potential and Scalability Challenges of Germanium CMOS", Invited
    2011 IEEE International Electron Device Meeting (IEDM2011), pp.646-649,
    (Dec. 7, 2011, Washington DC).
  • K. Nagashio, T. Moriyama, R. Ifuku, T. Yamashita, T. Nishimura, and A. Toriumi,
    "Is Graphene Contacting with Metal Still Graphene?",
    2011 IEEE International Electron Device Meeting (IEDM2011), pp.27-30,
    (Dec. 5, 2011, Washington DC).
  • S. K. Wang, K. Kita, K. Nagashio, T. Nishimura, and A. Toriumi,
    "Oxygen Vacancy Formation, Diffusion and GeO desorption in GeO2/Ge Stack",
    42th IEEE Semiconductor Interface Specialists Conference (SISC2011),
    (Dec.3, 2011, Arlington)
  • T. Nishimura and A. Toriumi,
    "MIGS – metal layer formation model at metal/Ge schottky barrier diode interface",
    42th IEEE Semiconductor Interface Specialists Conference (SISC2011) ,
    (Dec.2, 2011, Arlington)
  • C. H. Lee, T. Tabata, T. Nishimura, K. Nagashio, K. Kita, and A. Toriumi,
    "Study of Wet Etching Chemistry on Ge Surface in DIW",
    42th IEEE Semiconductor Interface Specialists Conference (SISC2011),
    (Dec.1, 2011, Arlington)
  • A. Toriumi, Y. Nakajima and K. Kita,
    "Opportunities for Phase-controlled Higher-k HfO2", invited,
    220th ECS Meeting, (Oct. 10, 2011, Boston)
  • A. Toriumi and K.Nagashio,
    "Material Characterization of Graphene", Invited
    28th Annual Advanced Metallization Conference 2011,(Oct.4, 2011, San Diego)
  • C. H. Lee, T. Nishimura, T. Tabata, D. D. Zhao, R. Ifuku, K. Nagashio, K. Kita, and A. Toriumi,
    "Experimental Study of Carrier Transport in Ultra-Thin Body GeOI MOSFETs",
    2011 IEEE International SOI Conference,(Oct.6, 2011, Phoenix)
  • S. Nakatsubo, T. Nishimura, K. Kita, K. Nagashio and A. Toriumi,
    "Thermodynamic Control of Interface Layer Formation in High-k Gate Stacs on 4H-SiC",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp614-615.(Sep.30, 2011, Nagoya)
  • D. D. Zhao, C. H. Lee, T. Nishimura, K. Nagashio and A. Toriumi,
    "Dual Gated Germanium Junctionless p-MOSFETs",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp923-924.(Sep.30, 2011, Nagoya)
  • C. H. Lee, T. Nishimura, T. Tabata, M. Yoshida, K. Nagashio, K. Kita and A. Toriumi,
    "Control of Surface Roughness on Ge by Wet Chemical Treatments and Its Effects on Electron Mobility in n-FETs",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp925-926.(Sep.30, 2011, Nagoya)
  • R. Ifuku, K. Nagashio, T. Nishimura and A. Toriumi,
    "Effects of Randomly Distributed Local Dirac Points in Graphene Channel on Its FET Transfer Characteristics",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp1284-1285.(Sep.30, 2011, Nagoya)
  • T. Moriyama, K. Nagashio, T. Nishimura and A. Toriumi,
    "Electrical Conductance in Graphene Contacting with Metal",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp1288-1289.(Sep.30, 2011, Nagoya)
  • T. Nishimura, K. Nagashio, K. Kita and A. Toriumi,
    "A Study of Fermi-level Pinning in Ge Schottky and MIS Tunnel Junctions",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp913-914.(Sep.29, 2011, Nagoya)
  • T. Tabata, C. H. Lee, T. Nishimura, S. K. Wang, K. Kita and A. Toriumi,
    "1.2 nm-EOT Al2O3 /Ge Gate Stack with GeO X-free Interface",
    2011 International Conference on Solid State Devices and Materials (SSDM), pp883-884.(Sep.28, 2011, Nagoya)
  • K. Nagashio and A. Toriumi,
    "Graphene/metal contact for graphene FET",
    Advanced Metallization Conference 2011 (ADMETA 2011), invited,
    (Sep.15, 2011, Tokyo, Shibaura tech.)
  • K. Nagashio,
    "Graphene devices: from experimental viewpoints"(Short course),
    Third international conf. on Microelectronics and Plasma Technology,
    (
    Jul. 4, 2011, Dalian)
  • Y. Nakajima, K. Kita, T. Nishimura, K. Nagashio, and A. Toriumi,
    "Phase Transformation Kinetics of HfO2 Polymorphs in Ultra-Thin Region",
    2011 Symposia on VLSI Technology,(Jun15, 2011, Kyoto)
  • A. Toriumi, C.H. Lee, T. Nishimura, S.K. Wang, K. Kita, and K. Nagashio,
    "Recent progress of Ge technology for a post-Si CMOS", invited,
    219th ECS Meeting, (May 4, 2011, Montreal).
  • D. Zhao, T. Nishimura, C. Lee, R. Ifuku, K. Nagashio, K. Kita, and A. Toriumi,
    "Junctionless Ge MOSFETs Fabricated on 10 nm-Thick GeOI Substrate",
    219th ECS Meeting, (May 4, 2011, Montreal).
  • S. K. Wang, K. Kita, T. Nishimura, K. Nagashio, and A. Toriumi,
    "Interfacial Reaction Induced GeO Desorption, GeO2 Crystallization and Non-uniform Void Formation in GeO2/Ge Stack",
    2011 MRS Spring Meeting (Apr. 28, 2011, San Francisco)
  • A. Toriumi, C.H. Lee, T. Nishimura, D. Zhao, S.K. Wang, K. Kita, and K. Nagashio,
    "Very High Electron and Hole Mobility in Ge MOSFETs", invited,
    2011 MRS Spring Meeting (Apr. 27, 2011, San Francisco)
  • K. Nagashio, T. Yamashita, T. Nishimura, K. Kita, and A. Toriumi,
    "Transport properties of graphene on SiO2 with specific surface structures",
    2011 MRS Spring Meeting, (Apr. 27 ,2011, San Francisco).
  • C. H. Lee, D. D. Zhao, T. Nishimura, K. Nagashio, K. Kita, and A. Toriumi,
    "Direct Comparison of Electron and Hole Mobility in a Single GeOI MOSFET with Ge/SiO2 Interface",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011),pp. 143-144. (Jan. 21, 2011, Tokyo)
  • Y. Nakajima, K. Kita, T. Nishimura, K. Nagashio, and A. Toriumi,
    "Demonstration of Very High-k HfO2 (k~50) by Suppressing Martensitic Transformation in Thin Dielectric Films",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011),pp. 7-8. (Jan. 20, 2011, Tokyo)
  • T. Tabata, C. H. Lee, K. Kita, and A. Toriumi,
    "Interface Layer Scavenging and Defect Generation in LaLuO3/Ge MIS Gate Stack",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011),
    pp. 13-14. (Jan. 20, 2011, Tokyo)
  • T. Yamashita, K. Nagashio, T. Nishimura, K. Kita, and A. Toriumi,
    "A Strong Interaction of Exfoliated Graphene with SiO2/Si Substrate",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011),pp. 19-20. (Jan.20, 2011, Tokyo)
  • S. K. Wang, K. Kita, T. Nishimura, K. Nagashio, and A. Toriumi,
    "Kinetic Effects of Oxygen Vacancy Formed by GeO2/Ge Interfacial Reaction",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011),pp. 31-32 . (Jan. 20, 2011, Tokyo).
  • T. Nishimura, C. H. Lee, K. Nagashio, K. Kita, and A.Toriumi,
    "Sulfur Passivation of Germanium Surface by Vapor-phase Sulfidation at Elevated Temperature",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011), pp. 67-68. (Jan. 20 2011, Tokyo)
  • D. D. Zhao, T. Nishimura, C. H. Lee, K. Nagashio, K. Kita, and A. Toriumi,
    "Junctionless Ge p-MOSFETs Fabricated on Ultra-thin GeOI Substrate",
    2011 International Workshop on Dielectric Thin Film for Future Electron Devices (IWDTF2011), pp. 141-142. (Jan. 20, 2011, Tokyo)

Domestic

  • 長汐晃輔,西村知紀,喜多浩之,鳥海 明
    「Systematic Investigation of the Intrinsic Channel Properties and Contact Resistance of Monolayer and Mutltilayer Graphene Field-Effect Transistor」
    「優秀論文賞受賞記念講演」
    第72回応用物理学会学術講演会
    (2011年8月31日, 山形大学(山形))
  • 森山喬史,長汐晃輔,西村知紀,鳥海 明
    「金属と接触するグラフェンの電気伝導特性」
    第72回応用物理学会学術講演会
    (2011年8月31日, 山形大学(山形))
  • 長汐晃輔,鳥海明
    「異なる表面構造を有するSiO2基板/グラフェン相互作用に対する理解と制御 ー製膜後に転写する基板をどう選ぶかー」 招待講演
    第72回応用物理学会学術講演会
    (2011年8月29日, 山形大学(山形))

  • 鳥海明
    「Ge CMOS の可能性と課題」 招待講演
    第75回半導体・集積回路技術シンポジウム
    (2011年7月7日, 早稲田大学(東京))
  • 長汐晃輔,鳥海明
    「グラフェントランジスタの接合とその界面に対する理解と制御」招待講演
    第30回電子材料シンポジウム
    (2011年7月1日,滋賀)
  • 長汐晃輔, 鳥海明,
    「Graphene/SiO2界面に対する理解と制御」招待講演
    電子デバイス研究会, 特別ワークショップ
    (2011年3月7日, 首都大学東京(東京))
  • 西村 知紀, 李 忠賢, 王 盛凱, 田畑 俊行, 長汐 晃輔, 喜多 浩之, 鳥海 明
    「High-k/Ge MOSFETにおける移動度特性の向上」 招待講演
    「第16回ゲートスタック研究会 ─材料・プロセス・評価の物理─」
    p.12 (2011年1月22日,東京) 



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