Awards List
-2015-
Publication
- Xiuyan Li, Takeaki Yajima Tomonori Nishimura, Akira Toriumi
"Study of Si kinetics in interfacial SiO2 scavenging in HfO2 gate stacks. "
Appl. Phys. Exp. 8, 061304 (2015).
- T. Yajima, T. Nishimura, A, Toriumi
"Positive-bias gate-controlled metal-insulator transition in ultrathin VO2 channels with TiO2 gate dielectrics. "
Nature Commun. 6, 10104 (2015).
- T. Yajima, Y. Hikita1, M. Minohara, C. Bell, J. A. Mundy, L. F. Kourkoutis, D. A. Muller, H. Kumigashira, M. Oshima and H. Y. Hwang
"Engineering Artificial Interface Dipoles at Oxide Heterointerfaces. "
PF Activity Report 32, 12 (2015).
- Nan Fang, Kosuke Nagashio, and Akira Toriumi
"Subthreshold transport in mono- and multilayered MoS2 FETs. "
Appl. Phys. Exp. 8, 065203 (2015).
- T. Yajima, Y. Ninomiya, T. Nishimura, and A. Toriumi
"Drastic change in electronic domain structures via strong elastic coupling in VO2 films. "
Phys. Rev. B 91, 205102 (2015).
- T. Yajima, Y. Hikita, M. Minohara, C. Bell, J. A. Mundy, L. F. Kourkoutis,
D. A. Muller, H. Kumigashira, M. Oshima & H. Y. Hwang
"Controlling band alignments by artificial interface dipoles at perovskite heterointerfaces. "
Nature Commun. 6, 6759 (2015).
- T. Yajima, M. Minohara, C. Bell, H. Kumigashira, M. Oshima, H. Y. Hwang, and Y. Hikita
"Enhanced Electrical Transparency by Ultrathin LaAlO3 Insertion at Oxide Metal/Semiconductor Heterointerfaces. "
Nano Lett. 15, 1622 (2015).
- Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Kosuke Nagashio, and Akira Toriumi
"Reliability assessment of germanium gate stacks with promising initial characteristics. "
Appl. Phys. Exp. 8, 021301 (2015).
- Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima and Akira Toriumi
"Nondestructive characterization of oxide/germanium interface by direct-gap photoluminescence analysis. "
Appl. Phys. Exp. 8, 051301 (2015).
International conference
- Cimang Lu and Akira Toriumi,
"Structural coordination of rigidity with flexibility in gate dielectric films for sub-nm EOT Ge gate stack reliability",
IEDM 14.6
(Dec. 8, 2015, Washington D.C., USA)
- Xiuyan Li and Akira Toriumi,
"Self-decomposition of SiO2 due to Si-chemical potential increase in SiO2 between HfO2 and substrate - Comprehensive understanding of SiO2-IL scavenging in HfO2 gate stacks on Si, SiGe and SiC",
IEDM 21.4
(2015, Washington D.C., USA)
- Che-Tsung Chang and Akira Toriumi,
"Preferential oxidation of Si in SiGe for shaping Ge-rich SiGe gate stacks",
IEDM 21.5
(Dec. 8, 2015, Washington D.C., USA)
- Shoichi Kabuyanagi and Akira Toriumi,
"Effects of free-carriers on rigid band and bond descriptions in germanium - Key to designing and modeling in Ge nano-devices -",
IEDM 34.2
(Dec. 9, 2015, Washington D.C., USA)
- Akira Toriumi
"Materials and Process Controls in Germanium Gate Stacks", invited
SISC(46th IEEE Semiconductor Interface Specialists Conference),
(Dec. 4, 2015, Arlington, VA, USA)
- Takeaki Yajima
"Interaction between 2D Electrons and 3D Metal-Insulator Transitions in VO2-Channel Transistors",
CEMS Topical Meeting on Oxide Interfaces T05
(2015, Wako, Japan)
- Lun Xu, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
"Anomalous Electrical Properties of Au/SrTiO3 Interface",
IWDTF p119
(Nov.4, 2015, Miraikan, National Museum of Emerging Science and Innovation,
Tokyo, Japan)
- Tomonori Nishimura, Takeaki Yajima, Shinji Migita, Akira Toriumi
"Ferroelectric Properties of Non-Doped Thin HfO2 Films",
IWDTF p7
(Nov.2, 2015, Miraikan, National Museum of Emerging Science and Innovation,
Tokyo, Japan)
- Akira Toriumi
"Technical Advancements and Scientific Impacts of HfO2 Gate Stacks",
IWDTF p11
(Nov. 2, 2015, Miraikan, National Museum of Emerging Science and Innovation,
Tokyo, Japan)
- T. Yajimia, G. Oike, T. Nishimura, and A. Toriumi,
"Electrochemical Doping as an Alternative to Ion Implantation in Oxide Semiconductor Thin Films",
228th ECS Meeting E04
(Oct. 15, 2015, Phoenix, AZ, USA)
- A. Toriumi, C. Lee, and T. Nishimura,
"Effects of Ge Substrate Annealing in H2 on Electron Mobility and
on Junction Leakage in n-Channel Ge Mosfets", invited
228th ECS Meeting,
(Oct. 14, 2015, Phoenix, AZ, USA)
- S. Kabuyanagi, T. Nishimura, T. Yajimia and A. Toriumi,
"Gate-Bias Dependent Phonon Softening Observed in Ge Mosfets",
228th ECS Meeting G04
(Oct. 13, 2015, Phoenix, AZ, USA)
- A. Toriumi and X. Li,
"Scavenging Kinetics of Interfacial SiO2 in HfO2/SiO2/Si Gate Stacks
", invited
228th ECS Meeting,
(Oct. 13, 2015, Phoenix, AZ, USA)
- S. Kabuyanagi, T. Nishimura, T. Yajimia and A. Toriumi,
"Direct Evidence of Freecarrier Induced Bandgap Narrowing in Ge",
SSDM N-3-2
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- T. Yajimia, T. Nishimura, and A. Toriumi,
"Solid-State Operation of Mott Transistors with Ultra-Thin VO2 Channels",
SSDM H-3-3
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- X. Li, T. Yajimia, T. Nishimura, and A. Toriumi,
"Comprehensive Understanding of SiO2-IL Scavenging in HfO2/SiO2/Si Stack",
SSDM N-3-4
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- C. Lu, C.H. Lee, T. Nishimura and A. Toriumi,
"Beyond GeO2 on Ge: Network Modification of GeO2 for Reliable Ge Gate Stacks",
SSDM N-4-1
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- C.T. Chang, T. Nishimura, and A. Toriumi,
"Thermodynamic Knob for High Performance SiGe Gate Stack Formation",
SSDM N-4-4
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- N.Fang, K.Nagashio, A.Toriumi
"Direct Evidence of Defect-defect Correlation in Atomically Thin MoS2 Layer by Random Telegraphic Signals Observed in Back-gated FETs",
SSDM D-3-6L
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- T.C. Liu, S. Kabuyanagi, T. Nishimura, and A. Toriumi,
"n+Si/pGe Cross Heterojunctions Fabricated by Narrow Membrane Bonding",
SSDM PS-1-10
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- T. Nishimura, T. Nakamura, T. Yajima and A. Toriumi,
"Observation of Plastic and Elastic Deformations in Ge Films of Bonded GeOI",
SSDM PS-1-14
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- K. Izukashi, T. Nishimura, S. Migita, and A. Toriumi,
"New Structural Properties of Ferroelectric Y2O3-doped HfO2 Films Probed by Microscopic Raman Spectroscopy Measurements",
SSDM PS-1-20
(Sep. 29, 2015, Sapporo Convention Center, Sapporo, Hokkaido, Japan)
- A. Toriumi,
"Opportunities of high performance Ge CMOS",
Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors V,
(Jun. 17, 2015, Lake Tahoe, California, USA)
- T. Yajima, T. Nishimura, and A. Toriumi
"Interaction between 2D electrons and 3D metal-insulator transition in VO2-channel transistors",
ep2ds-21,
(Jul. 28, 2015, Sendai, Japan)
- C. Lu, C. H. Lee, T. Nishimura, and A. Toriumi
"Design and Demonstration of Reliability-Aware Ge Gate Stacks with 0.5 nm EOT",
2015 Symposium on VLSI Technology,
(Jun. 16, 2015, Rihga Royal Hotel Kyoto, Kyoto, Japan)
- S. Kabuyanagi, T. Nishimura, T. Yajima, and A. Toriumi,
"Effect of Free Carrier Accumulation or Depletion on Zone-center Vibrational
Mode in Ge",
2015 Silicon Nanoelectronics Workshop
(Jun. 15, 2015, Rihga Royal Hotel Kyoto, Kyoto, Japan)
- X. Li, T. Yajima, T. Nishimura, and A. Toriumi,
"Significance of Kinetic-linkage of Oxygen Vacancy with SiO2/Si Interface
for SiO2-IL Scavenging in HfO2 Gate Stacks",
2015 Silicon Nanoelectronics Workshop
(Jun. 14, 2015, Rihga Royal Hotel Kyoto, Kyoto, Japan)
- T. Nishimura, C. H. Lee, T. Nakamura, T. Yajima, K. Nagashio, K. Kita, and A.Toriumi,
"Recent progress of Ge junction technology", invited,
15th International Workshop on Junction Technology (IWJT2015),
(Jun. 12, 2015, Kyoto University (Uji Campus), Kyoto, Japan)
- T. Nishimura, T. Yajima, S. Migita, and A. Toriumi,
"Interface-Driven Ferroelectricity of Non-Doped HfO2",
2015 JOINT ISAF-ISIF-PFM CONFERENCE
(May 27, 2015, Singapore)
- A. Toriumi, C. H. Lee, and T. Nishimura
"H2 Annealing Effects of Ge Substrate both on Electron Mobility and
on Junction Leakage in Ge n-MOSFETs", invited
The 2015 E-MRS Spring Meeting
(May 14, 2015, Lille, France)
- Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
"Critical Role of Domain Boundary Parallel to the Interface in the Operation of VO2 Mott Transistors. "
2015 MRS Spring Meeting, SS2.01
(Apr. 7, 2015, San Francisco, USA)
- Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima, and Akira Toriumi
"Study of Raman Peak Shift in Heavily Doped Germanium - A new research opportunity using ultra-thin GeOI. "
8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-04
(Jan. 29, 2015, Sendai, Japan)
- C. H. Lee, T. Nishimura, C. Lu, S. Kabuyanagi, and A. Toriumi
"Impact of Hydrogen-induced Out-diffusion of Oxygen from Ge Surface on Junction Leakage and Electron Mobility in Ge n-MOSFETs. "
8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-05
(Jan. 29, 2015, Sendai, Japan)
- C-T. Chang, T. Nishimura and A. Toriumi
"Dielectric Film Engineering for Ge-rich SiGe MOS Gate Stacks. "
8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-08
(Jan. 29, 2015, Sendai, Japan)
- Tony C. Liu, Shoichi Kabuyanagi, Tomonori Nishimura, and Akira Toriumi
"Fabrication and Characterization of n+Si/pGe Heterojunctions by Narrow Membrane Bonding. "
8th International WorkShop on New Group IV Semiconductor Nanoelectronics and JSPS Core-to-Core Program Joint Seminar, O-09
(Jan. 29, 2015, Sendai, Japan)
- T. Yajima
"Nano-scale electrochemical doping in oxide semiconductor. "
SNU-UT Ad-hoc Workshop on Electronic and ionic processes at heterogeneous interfaces
(2015, Seoul, Japan)
Domestic
- 鳥海明
「Ge基板中酸素の役割-良いこと、悪いこと-」
NWDTF2015 in KOCHI
(2015年12月19日, 高知工科大学, 高知県、高知市)
- 株柳 翔一、西村 知紀、矢嶋 赳彬、鳥海 明
「フリーキャリア密度に依存したGeの電子物性およびフォノン物性」,
2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 15p-1C-11
(2015年9月16日,名古屋国際会議場, 愛知県、名古屋市)
- 矢嶋 赳彬、西村 知紀、鳥海 明
「VO2チャネルトランジスタのチャネル膜厚に依存したゲート変調」,
2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 14p-2H-13
(2015年9月15日,名古屋国際会議場, 愛知県、名古屋市)
- 矢嶋 赳彬、西村 知紀、鳥海 明
「チタン酸化物薄膜への電気化学的手法による微細領域キャリアドーピング」,
2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 14p-2H-13
(2015年9月15日,名古屋国際会議場, 愛知県、名古屋市)
- 柴山 茂久、方 楠、矢嶋 赳彬、西村 知紀、長汐 晃輔、鳥海 明
「1T-TaS2の相転移に対する温度およびゲートバイアス変調効果」,
2015 第76回応用物理学会秋季学術講演会, 6.3 酸化物エレクトロニクス 15p-1C-15
(2015年9月15日,名古屋国際会議場, 愛知県、名古屋市)
- 矢嶋赳彬、西村知紀、鳥海明
「VO2チャネルトランジスタのゲート電場に対する時間応答」
2015 第76回応用物理学会秋季学術講演会, 6.3酸化物エレクトロニクス 14p-2H-15
(2015年9月14日,名古屋国際会議場, 愛知県、名古屋市)
- C.Lu, C. Lee, T. Nishimura, and A. Toriumi,
"Interface-aware high-k dielectric designing for deep sub-nm EOT Ge
gate stack"
Young Scientist Presentation Award Speech
2015 第76回応用物理学会秋季学術講演会, 6.3酸化物エレクトロニクス 14a-4C-10
(2015年9月14日,名古屋国際会議場, 愛知県、名古屋市)
- Akira Toriumi
「Ge-CMOSのためのGeO2/Ge界面制御」,
2015 第76回応用物理学会秋季学術講演会, シンポジウム(越境する絶縁膜/半導体界面技術 ~ Si から Non-Si へ)14p-4C-3
(2015年9月14日,名古屋国際会議場, 愛知県、名古屋市)
- X. Li, T. Yajima, T. Nishimura, and A. Toriumi
"The critical role of Si chemical potential in SiO2 scavenging in
HfO2 gate stacks"
2015 第76回応用物理学会秋季学術講演会, 13.3絶縁膜技術 13a-4C-12
(2015年9月13日,名古屋国際会議場, 愛知県、名古屋市)
- C.Lu, T. Nishimura, and A. Toriumi,
"How to secure both sufficient passivation and long term reliability
in Ge gate stack -The key is to keep a proper network structure of oxides-"
2015 第76回応用物理学会秋季学術講演会, シンポジウム(Ge-CMOSはどこまで進んでいるのか)13p-4C-1
(2015年9月13日,名古屋国際会議場, 愛知県、名古屋市)
- Akira Toriumi
「どこまでGe-CMOS技術は進んでいるのか - イントロダクション -」,
2015 第76回応用物理学会秋季学術講演会, シンポジウム(Ge-CMOSはどこまで進んでいるのか)13p-4C-1
(2015年9月13日,名古屋国際会議場, 愛知県、名古屋市)
- Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Kosuke Nagashio, Akira Toriumi
「Reliability-aware Germanium Gate Stack Formation by GeO2 Network Modification」,
2015 第62回応用物理学会春季学術講演会, 13.3 絶縁膜技術 14a-A24-11
(2015年3月14日, 東海大学湘南キャンパス(平塚))
- Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Kosuke Nagashio, Akira
Toriumi
「Design of High-k and Interfacial Layer on Germanium for 0.5nm EOT」,
2015 第62回応用物理学会春季学術講演会, 13.3 絶縁膜技術 14a-A24-12
(2015年3月14日, 東海大学湘南キャンパス(平塚))
- Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima, Akira Toriumi
「Non-destructive Characterization of Oxide/Ge Interface by Photoluminescence Measurement」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-4
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- Chi Liu, Shoichi Kabuyanagi, Tomonori Nishimura, Akira Toriumi
「n+Si/pGe Heterojunctions Fabricated by Narrow Membrane Bonding」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-5
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- Toshimitsu Nakamura, Tomonori Nishimura, Takeaki Yajima, Akira Toriumi
「Inspection of elastic stress and generated defects in thin Ge filmon GeOI wafer」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-7
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- Shoichi Kabuyanagi, Tomonori Nishimura, Takeaki Yajima, Akira Toriumi
「Phonon-softening in Germanium by Free Carrier Accumulation -Experimental Distinction between Impurity and Free Carrier Effect-」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-9
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- Xiuyan Li, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
「Catalytic Effect of Substrate-Si on SiO2-IL Scavenging in HfO2/SiO2/Si Stacks」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-10
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- Xiuyan Li, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
「Analytical Model for SiO2-IL Scavenging in HfO2/SiO2/Si Stacks」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-11
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- CheTsung Chang, Tomonori Nishimura, Akira Toriumi
「2-nm-EOT Y-Si-O Gate Stack Formation on Si0.5Ge0.5」,
2015 第62回応用物理学会春季学術講演会, 13.6 Semiconductor English Session 12a-A23-12
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- 西村 知紀, 矢嶋 赳彬, 鳥海 明
「TiN/HfO2/TiN構造におけるHfO2膜の強誘電的特性」,
2015 第62回応用物理学会春季学術講演会, 13.3 絶縁膜技術 13a-A24-13
(2015年3月13日, 東海大学湘南キャンパス(平塚))
- 矢嶋 赳彬, 西村 知紀, 鳥海 明
「TiO2固体絶縁膜を用いたVO2モットトランジスタの動作機構の研究」,
2015 第62回応用物理学会春季学術講演会, 6.3 酸化物エレクトロニクス 13a-D10-9
(2015年3月13日, 東海大学湘南キャンパス(平塚))
- 矢嶋 赳彬, 西村 知紀, 鳥海 明
「VO2薄膜における金属・絶縁体転移を用いた電界効果三端子素子の実証」,
2015 第62回応用物理学会春季学術講演会, 13 半導体シンポジウム 12p-A29-11
(2015年3月12日, 東海大学湘南キャンパス(平塚))
- 株柳 翔一, 西村 知紀, 矢嶋 赳彬, 鳥海 明
「電子濃度および界面の境界条件に強く依存したGeの電子構造」,
第20回ゲートスタック研究会, 5-2
(2015年1月31日, 東レ研修センター(三島))
- Xiuyan Li, Takeaki Yajima, Tomonori Nishimura, Akira Toriumi
「Kinetic Studying of SiO2-IL Scavenging in HfO2/SiO2/Si Stack」,
第20回ゲートスタック研究会, 4-3
(2015年1月31日, 東レ研修センター(三島))
- Cimang Lu, Choong Hyun Lee, Tomonori Nishimura, Akira Toriumi
「Critical Roles of Doped-Metal Cation in GeO2 for Gate Stack Formation on Ge」,
第20回ゲートスタック研究会, 7-4
(2015年1月31日, 東レ研修センター(三島))
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